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P5000
产品描述

Manufacturer : AMAT

Type: Etcher

Model: P5000

技术支持

• Applied Materials (AMAT) P5000 Oxide etcher

• 21 slot VME (Mark II mainframe)

• 200mm wafers

• 3 process chambers

o ESC (Electro-Static-Chuck)

o Turbo pumped

o Unibody chambers (Mxp)

o Current configuration is non-gate valve, but   this can be added

• System is complete with cables, heat exchanger, vacuum pumps, mini controller, RF generators, and AC panel

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Contact
上海友相电子科技有限公司

地址:上海嘉定区曹安公路5588号814

电话:+86 21 58886448      +86 13182712576(周先生)

传真:+86 21 58886440      Email: yi_zhou@chinauvision.com