P5000
AMAT
产品描述
Manufacturer : AMAT
Type: Etcher
Model: P5000
技术支持
• Applied Materials (AMAT) P5000 Oxide etcher
• 21 slot VME (Mark II mainframe)
• 200mm wafers
• 3 process chambers
o ESC (Electro-Static-Chuck)
o Turbo pumped
o Unibody chambers (Mxp)
o Current configuration is non-gate valve, but this can be added
• System is complete with cables, heat exchanger, vacuum pumps, mini controller, RF generators, and AC panel
