Ultratech
-Manufacturer :-Type : Wafer Stepper
AP300
-Model :Ultratech Stepper AP300 (i-Line Stepper)
Configuration:
1、 Standard Features Target:
-2.0 um, Extended Field, ghi-lineBroadband Lens ∙ Dual 1200 W LampIlluminator
-Universal Size/Warped Wafer Kit: 200,and 300mm.
-FOSB Cassette to Cassette WaferHandling
-Wafer Thickness Handling from 0.4 mmto 2.0 mm
-PATMAX MVS Alignment System
-MVS Alignment Spectrum of 530 - 570 nm
-Lens Distortion Reference - No lensmatching
-6 Slot Reticle Stack, Manual FrontLoading GEM HSMS Communications
-Power Source: 208 V three phase, 5wire, 150 amp
-Environmental Chamber
2、 AP300 Test Reticle 6x6
3、 FOUP Wafer Handler
4、 Enhanced Bottom Pellicle Protection
5、 ghi-line AutoFilter Changer
6、 Edge Exclusion System with one Exclusion Ring Specify ring size (15mm)
7、 Closed Loop Cooling
8、 Prism Purge Kit (requires CLC)