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Ultratech Saturn Spectrum 3e
产品描述

-Manufacturer : Ultratech

-Type : Wafer Stepper

-Model : Saturn Spectrum 3e


技术支持

Major Specifications:
ghi-line Broadband Lens
- Universal Wafer Size Change Kit: 4", 5" ,6" &8"
- Auto Wafer Thickness Compensator (0.4 to 4.0mm)
- Robotic Wafer Handler
- PATMAX MVS Alignment System
- Lens Distortion Reference-No lens matching
- 6x6 inch Reticle Type
- Dual Flip Aperture, 2,3 and 4 field
- Dynamic Focus w/extended range+200um
- Stepper Power Source: 208 three phase
- Environmental Chamber
- Chamber Power Source: 208 three phase
- SECSII Compatible
- ghi-line Automatic Filter Changer
- 1200 W Illuminator
Options to include:
- Bottom Pellicle Protection
- 44mm x 26.7mm Field Size
- SEMI standard. JEIDA standard is optional.

NOTE: with SMIF, only 150mm and 200mm are valid options for wafer size.

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上海友相电子科技有限公司

地址:上海嘉定区曹安公路5588号814

电话:+86 21 58886448      +86 13182712576(周先生)

传真:+86 21 58886440      Email: yi_zhou@chinauvision.com