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Quantum X Plus High Current Implanter
产品描述

-Manufacturer : AMAT

-Type : Sputtering System

-Model : Quantum X Plus


技术支持

EQUIPMENT DETAILS:
Currently configured for 300mm wafer sizes Inspect to confirm configuration and condition. Process: Low Energy/High Current
Software version: 2.07
System Power Rating: 208 AC 3-Phase for System 4 Load Ports
Mainframe Chamber: N2/Ar/AsH3/BF3/PH3/CDA


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